TY  - GEN
AU  - Cao, Zexian
TI  - Thin film growth :physics, materials science and applications
SN  - 9781845697365(hb)
U1  - 621.38152 CAO/Thi 
PY  - 2011///
CY  - Oxford
PB  - Woodhead Publishing
KW  - Film growth
N1  - Includes references and index
ER  -