TY  - GEN
AU  - Leondes, Cornelius T 
TI  - MEMS/NEMS  Handbook techniques and applications volume 1 Design methods 
SN  - 9780387245201 (hb)
U1  - 620.5 LEO/Mem /vol 1 
PY  - 2006///
CY  - New york
PB  - Sringer
KW  - Microgripper
N1  - Include index
ER  -