| 000 | 00614 a2200181 4500 | ||
|---|---|---|---|
| 020 | _a9780387245201 (hb) | ||
| 082 | _a620.5 LEO/Mem /vol 1 | ||
| 100 |
_aLeondes, Cornelius T _eEditor |
||
| 245 | _aMEMS/NEMS Handbook techniques and applications volume 1 Design methods | ||
| 260 |
_aNew york: _bSringer, _c2006. |
||
| 300 |
_axviii, 380p.; _c24 x 16 cm. |
||
| 440 | _vVolume 2 fabrication techniques | ||
| 440 | _vvolume 3 Manufacturing methods | ||
| 440 | _avolume 4 Sensors and actuators | ||
| 440 | _aVolume 5 Medical applications and moems | ||
| 500 | _aInclude index | ||
| 650 | _aMicrogripper | ||
| 999 |
_c138323 _d138323 |
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